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"Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an ..."

Xin Xiong et al. (2022)

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DOI: 10.3390/S22239348

access: open

type: Journal Article

metadata version: 2024-07-03

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Xin Xiong, Chenguang Yin, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Hideaki Tamiya, Wei Gao:
Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer. Sensors 22(23): 9348 (2022)

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