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"A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device ..."

Mario Versaci et al. (2021)

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DOI: 10.3390/S21155237

access: open

type: Journal Article

metadata version: 2021-08-13

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Mario Versaci, Alessandra Jannelli, Francesco Carlo Morabito, Giovanni Angiulli:
A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field. Sensors 21(15): 5237 (2021)

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