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"Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the ..."

Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai (2014)

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DOI: 10.3390/S140406722

access: open

type: Journal Article

metadata version: 2022-10-02

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Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai:
Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process. Sensors 14(4): 6722-6733 (2014)

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