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"True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor."

Jan Thiesler et al. (2022)

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DOI: 10.3390/S22010314

access: open

type: Journal Article

metadata version: 2022-01-21

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  dblp key:
  - journals/sensors/ThieslerATD22
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  persistent URL:
  - https://dblp.org/rec/journals/sensors/ThieslerATD22
Jan Thiesler, Thomas Ahbe, Rainer Tutsch, Gaoliang Dai:
True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor. Sensors 22(1): 314 (2022)

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