"Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic ..."

Bolun Tang et al. (2022)

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DOI: 10.3390/S22186778

access: open

type: Journal Article

metadata version: 2022-11-21

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Bolun Tang, Yunbo Shi, Jianwei Li, Jie Tang, Qiaohua Feng:
Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors 22(18): 6778 (2022)

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