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"A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot ..."

Yonghong Qi et al. (2022)

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DOI: 10.3390/S22051973

access: open

type: Journal Article

metadata version: 2022-04-01

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  - journals/sensors/QiZLRLW22
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  - https://dblp.org/rec/journals/sensors/QiZLRLW22
Yonghong Qi, Minghui Zhao, Bo Li, Ziming Ren, Bing Li, Xueyong Wei:
A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference. Sensors 22(5): 1973 (2022)

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