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"Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS ..."

Rafel Perelló-Roig et al. (2018)

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DOI: 10.3390/S18093124

access: open

type: Journal Article

metadata version: 2022-10-02

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Rafel Perelló-Roig, Jaume Verd, Sebastià A. Bota, Jaume Segura:
Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators. Sensors 18(9): 3124 (2018)

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