"Micromechanical Characterization of Polysilicon Films through On-Chip Tests."

Ramin Mirzazadeh, Saeed Eftekhar Azam, Stefano Mariani (2016)

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DOI: 10.3390/S16081191

access: open

type: Journal Article

metadata version: 2018-11-30

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Ramin Mirzazadeh, Saeed Eftekhar Azam, Stefano Mariani:
Micromechanical Characterization of Polysilicon Films through On-Chip Tests. Sensors 16(8): 1191 (2016)

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