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"A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in ..."

Adel Merdassi, Peng Yang, Vamsy P. Chodavarapu (2015)

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DOI: 10.3390/S150407349

access: open

type: Journal Article

metadata version: 2018-11-14

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  - journals/sensors/MerdassiYC15
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  - https://dblp.org/rec/journals/sensors/MerdassiYC15
Adel Merdassi, Peng Yang, Vamsy P. Chodavarapu:
A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process. Sensors 15(4): 7349-7359 (2015)

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