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"2D Scanning Micromirror with Large Scan Angle and Monolithically ..."

Katja Meinel et al. (2020)

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DOI: 10.3390/S20226599

access: open

type: Journal Article

metadata version: 2023-09-30

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  - journals/sensors/MeinelMSSFZHOK20
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  - https://dblp.org/rec/journals/sensors/MeinelMSSFZHOK20
Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, Harald Kuhn:
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. Sensors 20(22): 6599 (2020)

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