"Key Processes of Silicon-On-Glass MEMS Fabrication Technology for ..."

Zhibo Ma et al. (2018)

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DOI: 10.3390/S18041240

access: open

type: Journal Article

metadata version: 2018-11-14

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Zhibo Ma, Yinan Wang, Qiang Shen, Han Zhang, Xuetao Guo:
Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application. Sensors 18(4): 1240 (2018)

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