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"Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene ..."

Cheng-Wen Ma et al. (2015)

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DOI: 10.3390/S150921567

access: open

type: Journal Article

metadata version: 2018-11-14

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Cheng-Wen Ma, Fu-Wei Lee, Hsin-Hung Liao, Wen-Cheng Kuo, Yao-Joe Yang:
Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures. Sensors 15(9): 21567-21580 (2015)

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