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"MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and ..."

Zheng Lu et al. (2024)

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DOI: 10.3390/S24082495

access: open

type: Journal Article

metadata version: 2024-05-17

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Zheng Lu, Hao Jia, Ding Wang, Haitao Yu:
MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA. Sensors 24(8): 2495 (2024)

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