"Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength ..."

Qianbo Lu et al. (2018)

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DOI: 10.3390/S18072036

access: open

type: Journal Article

metadata version: 2020-05-30

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Qianbo Lu, Jian Bai, Kaiwei Wang, Peiwen Chen, Weidong Fang, Chen Wang:
Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs. Sensors 18(7): 2036 (2018)

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