"Terahertz Detectors Using Microelectromechanical System Resonators."

Chao Li, Ya Zhang, Kazuhiko Hirakawa (2023)

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DOI: 10.3390/S23135938

access: open

type: Journal Article

metadata version: 2023-08-18

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Chao Li, Ya Zhang, Kazuhiko Hirakawa:
Terahertz Detectors Using Microelectromechanical System Resonators. Sensors 23(13): 5938 (2023)

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