"Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM ..."

Zhi Li et al. (2019)

Details and statistics

DOI: 10.3390/S19204529

access: open

type: Journal Article

metadata version: 2020-05-30

a service of  Schloss Dagstuhl - Leibniz Center for Informatics