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"Proximity Gettering Design of Hydrocarbon-Molecular-Ion-Implanted Silicon ..."
Kazunari Kurita et al. (2019)
- Kazunari Kurita, Takeshi Kadono, Satoshi Shigematsu, Ryo Hirose, Ryosuke Okuyama, Ayumi Onaka-Masada, Hidehiko Okuda, Yoshihiro Koga:
Proximity Gettering Design of Hydrocarbon-Molecular-Ion-Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors. Sensors 19(9): 2073 (2019)
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