"Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended ..."

Maximilian Krey et al. (2020)

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DOI: 10.3390/S20041001

access: open

type: Journal Article

metadata version: 2020-05-30

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Maximilian Krey, Bernd Hähnlein, Katja Tonisch, Stefan Krischok, Hannes Töpfer:
Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory. Sensors 20(4): 1001 (2020)

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