"10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and ..."

Jeong Nyeon Kim et al. (2020)

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DOI: 10.3390/S20154335

access: open

type: Journal Article

metadata version: 2020-12-25

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Jeong Nyeon Kim, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler, Judith A. Todd:
10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization. Sensors 20(15): 4335 (2020)

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