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ORCID"Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique."
Pin-Hsu Kao et al. (2009)
- Pin-Hsu Kao, Ching-Liang Dai
, Cheng-Chih Hsu, Chyan-Chyi Wu:
Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique. Sensors 9(8): 6219-6231 (2009)
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