"A Smart Active Phase-Change Micropump Based on CMOS-MEMS Technology."

Wenzui Jin et al. (2023)

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DOI: 10.3390/S23115207

access: open

type: Journal Article

metadata version: 2023-07-07

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Wenzui Jin, Yimin Guan, Qiushi Wang, Peng Huang, Qin Zhou, Kun Wang, Demeng Liu:
A Smart Active Phase-Change Micropump Based on CMOS-MEMS Technology. Sensors 23(11): 5207 (2023)

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