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"An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS ..."

Pinggang Jia et al. (2021)

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DOI: 10.3390/S21196602

access: open

type: Journal Article

metadata version: 2022-01-21

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Pinggang Jia, Jia Liu, Jiang Qian, Qianyu Ren, Guowen An, Jijun Xiong:
An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications. Sensors 21(19): 6602 (2021)

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