"Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric ..."

Abid Iqbal, Faisal Mohd-Yasin (2018)

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DOI: 10.3390/S18061797

access: open

type: Journal Article

metadata version: 2018-11-14

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Abid Iqbal, Faisal Mohd-Yasin:
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review. Sensors 18(6): 1797 (2018)

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