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"Wafer-Level Vacuum Packaging of Smart Sensors."

Allan Hilton, Dorota S. Temple (2016)

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DOI: 10.3390/S16111819

access: open

type: Journal Article

metadata version: 2018-11-14

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Allan Hilton, Dorota S. Temple:
Wafer-Level Vacuum Packaging of Smart Sensors. Sensors 16(11): 1819 (2016)

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