"Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured ..."

Yuzhen Guo et al. (2023)

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DOI: 10.3390/S23136061

access: open

type: Journal Article

metadata version: 2023-08-18

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  - https://dblp.org/rec/journals/sensors/GuoZYCZLZX23
Yuzhen Guo, Zengxing Zhang, Bin Yao, Jin Chai, Shiqiang Zhang, Jianwei Liu, Zhou Zhao, Chenyang Xue:
Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors 23(13): 6061 (2023)

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