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"Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for ..."

Song Guo et al. (2022)

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DOI: 10.3390/S22239275

access: open

type: Journal Article

metadata version: 2023-01-31

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  - journals/sensors/GuoFCJPXYW22
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  - https://dblp.org/rec/journals/sensors/GuoFCJPXYW22
Song Guo, Liuhaodong Feng, Shuo Chen, Yucheng Ji, Xinlin Peng, Yang Xu, Yong Yin, Shinan Wang:
Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement. Sensors 22(23): 9275 (2022)

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