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"A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates."

Xiaorui Fu, Lizhong Xu (2018)

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DOI: 10.3390/S18020362

access: open

type: Journal Article

metadata version: 2018-11-14

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Xiaorui Fu, Lizhong Xu:
A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates. Sensors 18(2): 362 (2018)

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