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"Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration."

Joachim Frühauf et al. (2022)

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DOI: 10.3390/S22166253

access: open

type: Journal Article

metadata version: 2022-12-05

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  dblp key:
  - journals/sensors/FruhaufGLDSE22
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  persistent URL:
  - https://dblp.org/rec/journals/sensors/FruhaufGLDSE22
Joachim Frühauf, Eva Gärtner, Zhi Li, Lutz Doering, Jan Spichtinger, Gerd Ehret:
Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration. Sensors 22(16): 6253 (2022)

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