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ORCID"Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual ..."
Xiaohui Du et al. (2016)
- Xiaohui Du, Yifang Liu, Anlin Li, Zhou Zhou
, Daoheng Sun, Lingyun Wang:
Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Sensors 16(2): 158 (2016)
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