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"Fabrication and Characterization of a CMOS-MEMS Humidity Sensor."
John Ojur Dennis, Abdelaziz Yousif Ahmed, Mohd Haris M. Khir (2015)
- John Ojur Dennis
, Abdelaziz Yousif Ahmed
, Mohd Haris M. Khir:
Fabrication and Characterization of a CMOS-MEMS Humidity Sensor. Sensors 15(7): 16674-16687 (2015)
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