"Design, Fabrication and Levitation Experiments of a Micromachined ..."

Feng Cui et al. (2011)

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DOI: 10.3390/S111211206

access: open

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/sensors/CuiLCZW11
Feng Cui, Wu Liu, Wenyuan Chen, Weiping Zhang, Xiaosheng Wu:
Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer. Sensors 11(12): 11206-11234 (2011)

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