Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties."

Wan-Chun Chuang, Yuh-Chung Hu, Pei-Zen Chang (2012)

> Home

Details and statistics

DOI: 10.3390/S121217094

access: open

type: Journal Article

metadata version: 2023-09-30

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/ChuangHC12
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/ChuangHC12
Wan-Chun Chuang, Yuh-Chung Hu, Pei-Zen Chang:
CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties. Sensors 12(12): 17094-17111 (2012)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.