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ORCID"An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer."
Deyong Chen et al. (2009)
- Deyong Chen, Zhengwei Wu, Lei Liu, Xiaojing Shi, Junbo Wang:
An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer. Sensors 9(3): 1330-1338 (2009)
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