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"A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology."
Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh (2021)
- Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh:
A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology. Sensors 21(1): 180 (2021)
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