"Development of an Automated Optical Inspection System for Rapidly and ..."

Pin-Chuan Chen et al. (2021)

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DOI: 10.3390/S21030698

access: open

type: Journal Article

metadata version: 2021-03-02

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Pin-Chuan Chen, Ya-Ting Lin, Chi-Minh Truong, Pai-Shan Chen, Huihua Kenny Chiang:
Development of an Automated Optical Inspection System for Rapidly and Precisely Measuring Dimensions of Embedded Microchannel Structures in Transparent Bonded Chips. Sensors 21(3): 698 (2021)

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