"Development of the Heterodyne Laser Encoder System for the X-Y Positioning ..."

Chung-Ping Chang et al. (2021)

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DOI: 10.3390/S21175775

access: open

type: Journal Article

metadata version: 2021-09-08

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Chung-Ping Chang, Tsung-Chun Tu, Siang-Ruei Huang, Yung-Cheng Wang, Syuan-Cheng Chang:
Development of the Heterodyne Laser Encoder System for the X-Y Positioning Stage. Sensors 21(17): 5775 (2021)

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