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"A real-time image processing algorithm for visual inspection of ..."

Hiroshi Sakou, Haruo Yoda, Masakazu Ejiri (1987)

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DOI: 10.1002/SCJ.4690181008

access: closed

type: Journal Article

metadata version: 2023-09-13

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Hiroshi Sakou, Haruo Yoda, Masakazu Ejiri:
A real-time image processing algorithm for visual inspection of semiconductor wafer patterns. Syst. Comput. Jpn. 18(10): 79-89 (1987)

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