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"Photomask pattern data processing system of bit-map method."

Hideki Koide, Choi Kim, Katsufusa Shono (1986)

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DOI: 10.1002/SCJ.4690170407

access: closed

type: Journal Article

metadata version: 2023-09-13

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  - journals/scjapan/KoideKS86
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  - https://dblp.org/rec/journals/scjapan/KoideKS86
Hideki Koide, Choi Kim, Katsufusa Shono:
Photomask pattern data processing system of bit-map method. Syst. Comput. Jpn. 17(4): 51-59 (1986)

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