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"Quantum lithography: status of the field."

Robert W. Boyd, Jonathan P. Dowling (2012)

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DOI: 10.1007/S11128-011-0253-Y

access: closed

type: Journal Article

metadata version: 2020-04-16

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Robert W. Boyd, Jonathan P. Dowling:
Quantum lithography: status of the field. Quantum Inf. Process. 11(4): 891-901 (2012)

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