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BibTeX record journals/qe/WangWLZFCC19
@article{DBLP:journals/qe/WangWLZFCC19, author = {Min Wang and Rongbo Wu and Jintian Lin and Jianhao Zhang and Zhiwei Fang and Zhifang Chai and Ya Cheng}, title = {Chemo-mechanical polish lithography: {A} pathway to low loss large-scale photonic integration on lithium niobate on insulator}, journal = {Quantum Eng.}, volume = {1}, number = {1}, year = {2019}, url = {https://doi.org/10.1002/que2.9}, doi = {10.1002/que2.9}, timestamp = {Tue, 13 Jul 2021 13:27:09 +0200}, biburl = {https://dblp.org/rec/journals/qe/WangWLZFCC19.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }

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