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"A sensor data mining process for identifying root causes associated with ..."

Eunji Kim et al. (2023)

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DOI: 10.1108/DTA-08-2022-0341

access: closed

type: Journal Article

metadata version: 2023-08-05

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Eunji Kim, Jinwon An, Hyunchang Cho, Sungzoon Cho, Byeongeon Lee:
A sensor data mining process for identifying root causes associated with low yield in semiconductor manufacturing. Data Technol. Appl. 57(3): 397-417 (2023)

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