"High-aspect-ratio micromachining via deep X-ray lithography."

Henry Guckel (1998)

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DOI: 10.1109/5.704264

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type: Journal Article

metadata version: 2023-08-31

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Henry Guckel:
High-aspect-ratio micromachining via deep X-ray lithography. Proc. IEEE 86(8): 1586-1593 (1998)

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