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"Vacuum-sealed silicon micromachined pressure sensors."

Masayoshi Esashi et al. (1998)

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DOI: 10.1109/5.704268

access: closed

type: Journal Article

metadata version: 2022-02-28

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  - journals/pieee/EsashiSIWM98
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  - https://dblp.org/rec/journals/pieee/EsashiSIWM98
Masayoshi Esashi, Susumu Sugiyama, Kyoichi Ikeda, Yuelin Wang, Haruzo Miyashita:
Vacuum-sealed silicon micromachined pressure sensors. Proc. IEEE 86(8): 1627-1639 (1998)

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