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"Monolithic two-dimensional arrays of micromachined microstructures for ..."

B. E. Cole, R. E. Higashi, R. A. Wood (1998)

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DOI: 10.1109/5.704273

access: closed

type: Journal Article

metadata version: 2022-02-28

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B. E. Cole, R. E. Higashi, R. A. Wood:
Monolithic two-dimensional arrays of micromachined microstructures for infrared applications. Proc. IEEE 86(8): 1679-1686 (1998)

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