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"Review: Semiconductor Piezoresistance for Microsystems."

A. Alvin Barlian et al. (2009)

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DOI: 10.1109/JPROC.2009.2013612

access: closed

type: Journal Article

metadata version: 2020-10-26

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  - journals/pieee/BarlianPMRP09
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  - https://dblp.org/rec/journals/pieee/BarlianPMRP09
A. Alvin Barlian, Woo-Tae Park, Joseph R. Mallon, Ali J. Rastegar, Beth L. Pruitt:
Review: Semiconductor Piezoresistance for Microsystems. Proc. IEEE 97(3): 513-552 (2009)

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