"Distributional reinforcement learning for run-to-run control in ..."

Zhu Ma, Tianhong Pan (2023)

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DOI: 10.1007/S00521-023-08760-1

access: closed

type: Journal Article

metadata version: 2023-08-31

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Zhu Ma, Tianhong Pan:
Distributional reinforcement learning for run-to-run control in semiconductor manufacturing processes. Neural Comput. Appl. 35(26): 19337-19350 (2023)

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