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"A nondestructive automated defect detection system for silicon carbide wafers."

Toshiro Kubota et al. (2005)

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DOI: 10.1007/S00138-004-0169-Y

access: closed

type: Journal Article

metadata version: 2017-05-17

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  - journals/mva/KubotaTMS05
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  - https://dblp.org/rec/journals/mva/KubotaTMS05
Toshiro Kubota, Parag Talekar, Xianyun Ma, Tangali S. Sudarshan:
A nondestructive automated defect detection system for silicon carbide wafers. Mach. Vis. Appl. 16(3): 170-176 (2005)

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