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"The effect of water on the mechanical properties of native oxide coated ..."
Yun-An Zhang et al. (2013)
- Yun-An Zhang, Jun-Yong Tao, Yan-Lei Wang, Zhi-Qian Ren, Bin Liu, Xun Chen:
The effect of water on the mechanical properties of native oxide coated silicon structure in MEMS. Microelectron. Reliab. 53(9-11): 1672-1675 (2013)
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