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"Spectroscopic photon emission microscopy: a unique tool for failure ..."

Ingrid De Wolf, Mahmoud Rasras (2001)

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DOI: 10.1016/S0026-2714(01)00104-4

access: closed

type: Journal Article

metadata version: 2020-10-26

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Ingrid De Wolf, Mahmoud Rasras:
Spectroscopic photon emission microscopy: a unique tool for failure analysis of microelectronics devices. Microelectron. Reliab. 41(8): 1161-1169 (2001)

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