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"Stress analyses of high spatial resolution on TSV and BEoL structures."
Dietmar Vogel et al. (2014)
- Dietmar Vogel, Ellen Auerswald, Jürgen Auersperg, Parisa Bayat, Raul D. Rodriguez
, Dietrich R. T. Zahn
, Sven Rzepka
, Bernd Michel:
Stress analyses of high spatial resolution on TSV and BEoL structures. Microelectron. Reliab. 54(9-10): 1963-1968 (2014)
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